Strain Microsensors Based on Carbon Nanotube/Polyimide Thin Films
2023 IEEE SENSORS(2023)
摘要
The work shows the process for the fabrication of strain sensors using a 5 mu m thick polyimide film loaded with 3 % weight carbon nanotubes as piezoresistive material. The sensors were produced using standard photolithography techniques, which allowed a reliable structuring of meanders with a linewidth of 50 mu m and a line aspect ratio of 1:10. The thin film sensors were tested under tensile 1% strain for their characterization. The gauge factor of the produced sensors was k similar to 30. The sensors exhibited a slight drift of their electrical resistance after repeated tensile cycles. It was also noticed that their electrical resistance is influenced by the temperature with a negative dependence. These results help to establish the possibilities of integrating polymer nanocomposites for the development of strain sensors.
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关键词
polyimide,piezoresistive polymers,thin films,carbon nanotube,nanocomposites,strain sensors,microfabrication
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