Large-Area Sub-5nm Plasmonic Nanogap Arrays: Advanced Fabrication, Characterization and Applications

Jeetendra Gour,Sebastian Beer,Pallabi Paul,Alessandro Alberucci,Adriana Szeghalmi,Ulf Peschel,Stefan Nolte,Uwe D. Zeitner

2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)（2023）

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ALD,atomic layer deposition,localized surface plasmon resonances,LSPR,metasurfaces,optically induced electron transitions,plasmonic nanogap arrays,size 5.0 nm

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