Nanosecond Laser-Induced Micro-Modifications in Bulk of Crystal Silicon
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)(2023)
Abstract
3D modifications of crystalline Si (c-Si) by nano-, pico-, or femtosecond lasers at 1550 nm-wavelength are under intensive studies nowadays due to the wide range of potential applications in photonics and optoelectronics [1]. Despite numerous amount of publications, the dependency of the modified region properties on processing laser parameters is still not completely clarified. Here we present an experimental study of local micro-modification produced by 1550 nm-wavelength ns-laser pulses in the bulk c-Si for a wide range of energies, durations, repetition rates, and writing speeds.
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Key words
crystal silicon,femtosecond laser,nanosecond laser pulses,nanosecond laser-induced micromodification,picosecond laser,Si/el,wavelength 1550 nm
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