Statistical Characterization of MMI Beam Splitters on Thin Film Lithium Niobate on Insulator (LNOI) Platform at Telecom Wavelength

Lithium niobate on insulator (LNOI) is among the promising integrated photonics platform that offers unique important optical properties such as: a high electro-optic (EO) coefficient, high intrinsic 2nd and 3rd order nonlinearities, and a large transparency window (350nm - 5500nm). The past few years observed a renaissance for LNOI photonics with many key experiments such as high speed, low Vπ electro-optical modulators [1], Kerr and EO optical frequency combs[2], [3], wavelength conversion[4], to name a few. Despite these impressive demonstration and success of LNOI as electro-optics and nonlinear platform its usage so far, have been limited to few academic groups around the world. Establishing a reliable, high quality and high-yield “foundry like” fabrication process for LNOI PICs is the key to ensure that these academic progresses translates into an industrial scale technology. CSEM is set to establish an open PIC foundry based on LNOI platform based on a well-tested process design kit (PDK) library. In this work we present the statical characterization of our multi-mode interferometer (MMI) beam splitters at C-band.