Nonvolatile Silicon MEMS Optical Switch Based on Bistable Mechanical Beams
2023 Opto-Electronics and Communications Conference (OECC)（2023）
Abstract
We have proposed and implemented a $2 \times 2$ nonvolatile silicon MEMS optical switch based on bistable mechanical beams driven by electrostatic comb actuators, which is fully compatible with standard silicon photonics foundry processes.
MoreTranslated text
Key words
silicon photonics,MEMS,optical switch,nonvolatile,bistable mechanical beam
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined