Impact of Interface Traps Generation on Flicker Noise Degradation in SI pMOSFETs

Yi Jiang,Luping Wang, Yanbin Yang,Dawei Gao,Rui Zhang

2023 China Semiconductor Technology International Conference (CSTIC)(2023)

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摘要
In this study, we examined the impact of interface states to the low frequency in Si pMOSFETs by applying a negative bias temperature instability (NBTI) stress. The subthreshold swing (S factor) degradation, the effective carrier mobility ($\mu_{eff}$) and the normalized drain current noise power spectral density ($S_{Id}$ 1/f) under different NBTI stress voltage ($V_{S}$) were characterized in devices. It is found that the $S_{Id}/Id^{2}$ increase with the stress voltage increases, due to the variation of interface trap density ($D_{it}$) increase.
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关键词
effective carrier mobility,flicker noise degradation,interface states,interface trap density,interface traps generation,NBTI stress voltage,negative bias temperature instability stress,normalized drain current noise power spectral density,Si pMOSFETs,stress voltage,subthreshold swing degradation
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