Over 12% of Coupling Coefficient Demonstrated by 3GHz Sc0.12 Al0.88 N Based Laterally Coupled Alternating Thickness (LCAT) Mode Resonators
2019 IEEE International Ultrasonics Symposium (IUS)(2019)
Abstract
In this work, we report a laterally coupled alternating thickness (LCAT) mode resonators operating at 3GHz with an effective electromechanical coupling coefficient (k
2
eff
) of 12.1%, using 12% scandium-doped aluminum nitride (Sc
0.12
Al
0.88
N) as the piezoelectric layer. The top and bottom electrodes are formed by patterning two groups of interdigitated electrodes (IDEs) on the top and bottom surface of the Sc
0.12
Al
0.88
N layer, respectively, both made of molybdenum (Mo). The thickness of the top electrode layer, Sc
0.12
Al
0.88
N layer, and the bottom electrode layer is 0.1μm, 0.7μm, and 0.2μm, respectively. The designed resonator is fabricated by in-house 200mm piezoelectric platform, with the Sc
0.12
Al
0.88
N deposited by physical vapour deposition (PVD). Electrical measurement results show that the series resonant frequency (f
s
) and the parallel resonant frequency (f
p
) are 2.96 GHz and 3.10 GHz, respectively, and the corresponding impedance at f
s
(R
s
) and impedance at f
p
(Rp) are 3.19 Ω and 546 Ω, respectively. Besides the high k
2
eff
of 12.1%, no spurious resonant modes are observed within a wide 1.2GHz frequency spectrum, demonstrating great potential of the reported Sc
0.12
Al
0.88
N based LCAT mode resonator in 5G duplexing solution on a single chip.
MoreTranslated text
Key words
scandium-doped aluminum nitride,ScAlN,LCAT,resonator,spurious mode,coupling coefficient,high frequency
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