LiNbO3/SiO2/Si POI Heterostructure Surface Acoustic Wave Sensor for Intermediate High Temperatures
2023 IEEE International Ultrasonics Symposium (IUS)（2023）
Abstract
In this work, a Surface acoustic wave (SAW) device combining temperature sensor and RFID code was optimized to operate in the 2.45 GHz ISM band and to cover the large temperature range from room temperature to 500°C. The SAW device consists in a reflective delay line (R-DL) and is based on a Piezoelectric on Insulator (POI) heterostructure substrate 128° YX-LiNbO3/SiO2/Si.
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Key words
high temperatures,surface acoustic wave sensor,piezoelectric on insulators (POI)
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