A Low-Ripple High-Frequency High-Voltage Power Supply for Ion Pumps

Zhechi Ye,Kawin Surakitbovorn,Sanghyeon Park,Juan Rivas-Davila

2023 IEEE Applied Power Electronics Conference and Exposition (APEC)（2023）

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摘要

Ion pumps rely on high-voltage power supplies with low output ripple to generate ultra-high vacuum. This paper presents a 2 to 7 kV DC power supply with less than 10 Vpp voltage ripple designed for such applications. The circuit utilizes high-frequency inverters, planar PCB transformers, Dickson voltage multipliers, and ripple cancellation. The implemented prototype can maintain 0.1% ripple at light load while achieving 84% peak efficiency at 80 W.

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关键词

ion pump,ripple,Dickson multiplier,planar transformer

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