A digitally controlled fully integrated voltage regulator with 3D-TSV based on-die solenoid inductor with backside planar magnetic core in 14nm tri-gate CMOS

Harish K. Krishnamurthy,Sheldon Weng,George E. Matthew,Ruchir Saraswat,Krishnan Ravichandran,James Tschanz,Vivek De

2017 Symposium on VLSI Circuits（2017）

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摘要

A fully integrated digitally controlled buck VR, featuring hysteretic and PFM control for maximum light load efficiency, with 3D-TSV based on-die solenoid inductor with backside planar magnetic core in 14nm tri-gate CMOS demonstrates 111 nH/mm2 inductance density & 80% conversion efficiency.

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