Theoretical Analysis of Microwave Breakdown for Microscale Gaps

S. Mahajanl,A. M. Loveless, A. Semnani, V. Ayyaswamy,A. L. Garner

2023 IEEE International Conference on Plasma Science (ICOPS)（2023）

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摘要

While DC gas breakdown is traditionally driven by Townsend avalanche (TA), the strong electric fields that arise for microscale gaps at non-vacuum pressures induce field emission (FE) that changes breakdown voltage behavior [1]. An asymptotic analysis in the limits of low (FE) and high (TA) ionization demonstrated the linear scaling of breakdown voltage in the FE regime and the transition to TA at larger gaps.

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Strong Electric Field

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