E-H Transitions in AR/O2 and AR/CL2 Inductively Coupled Plasmas-Modeling
2022 IEEE International Conference on Plasma Science (ICOPS)（2022）
Key words
attachment reactions,chamber walls,chamber averaged densities,ion density,photodetachment,substrate electrode,reactor impedance,impedance matching networks,reactive fluxes,power delivery,inter-pulse period,power pulse,electron densities,electronegative inductively coupled plasmas,inductive modes,capacitive modes,pulsed ICP,E-H transition,Hybrid Plasma Equipment Model,Ar-O2,Ar-Cl2
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