A high fill factor 1×20 MEMS mirror array based on ISC bimorph structure
2016 International Conference on Optical MEMS and Nanophotonics (OMN)(2016)
Abstract
In this paper, an electro-thermal-actuated 1×20 MEMS mirror array is designed, fabricated and tested. 20 mirrors are arranged with narrow gaps, an area filled factor 96% is reached. Each mirror is actuated by four independent bimorph actuators aiming to control 2D tilting. Here, a cross-talk is done to reduce thermal cross-talk by downward bimorph structure into a silicon cavity. the result shows that there is a thermal cross-talk about 5%.
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Key words
MEMS mirror array,electro thermal actuation,thermal cross-talk
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