Calibration of Elasticity Coefficient for Dual-Ring Optical Pressure Measurement Device

Microcantilever device is used for laser power measurement by the optical pressure method, combined with an interferometer to convert the power signal to a displacement signal for measurement. We designed a dual-ring microcantilever device and calibrated the elasticity coefficient of the device using standard weights and an interferometer measurement system. The calibration shows that the displacement of the microcantilever device has good linearity, and the measured elastic coefficients are in general agreement with the stress simulation results. By adding a thin glass plate to the surface of the microcantilever device to form a squeeze film air damping, the damped vibration time of the cantilever is greatly shortened and the signal-to-noise ratio is improved, which provides a new feasible idea for fast and accurate measurement of laser power.