2 concentrations as low as 500 ppm using a s"/>

Low-concentration detection of CO2 using suspended silicon waveguides in the mid-IR

2022 Conference on Lasers and Electro-Optics (CLEO)(2022)

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摘要
We show detection of CO 2 concentrations as low as 500 ppm using a suspended silicon photonic mid-IR waveguide. The performance is enabled by the low propagation loss (2.35 ± 0.25) dB/cm permitting sensing with waveguides up to 7 cm in length.
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关键词
suspended silicon waveguides,suspended silicon photonic mid-IR waveguide,low propagation loss,low-concentration detection,size 7.0 cm
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