Integration of single GaN micro-lenses with high index semiconductors by transfer printing

Nils Kolja Wessling,Saptarsi Ghosh,Benoit Guilhabert,Menno Kappers,Rachel A. Oliver,Martin D. Dawson,Michael J. Strain

2022 Conference on Lasers and Electro-Optics (CLEO)（2022）

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Abstract

Suspended GaN micro-lenses are micro-transfer printed onto diamond to increase light-coupling efficiency. We demonstrate micro-lenses with 4 – 13 µm diameter, up to 3 µm height and r.m.s. surface roughness below 2 nm.

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Key words

single GaN microlenses,high index semiconductors,microtransfer printing,suspended GaN microlenses,light-coupling efficiency,diamond,surface roughness,size 4.0 mum to 13.0 mum,GaN,C

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