Platform independent integration of telluride thin films for high speed on-chip photodetection

2023 Conference on Lasers and Electro-Optics (CLEO)(2023)

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摘要
We demonstrate platform-independent and scalable integration of tellurium thin film with photonic structures in silicon, silicon nitride and lithium niobate for ultra-broadband photodetection with a bandwidth of more than 40 GHz.
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关键词
(130.0250) Optoelectronics,(250.0040) Detectors,(160.4670) Optical materials
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