Substrate-Independent Technique of III-V Heterogeneous Integration of Focal Plane Arrays and Lasers

Michael G. Wood, Matthew Bahr, Jordan E. Gutierrez,Evan M. Anderson,Patrick S. Finnegan, Scott E. Weatherred, William M. Martinez, Courtney L. Hummell, Robert Reyna,Shawn C. Arterburn, Tom A. Friedmann,Samuel D. Hawkins,Victor J. Patel, Alex T. Hendrickson,John F. Klem, Chris M. Long,Jonathon T. Olesberg, Joshua C. Shank, Daniel R. Chumney,Quinn M. Looker

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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Key words

(120.4610) Optical fabrication,(130.3130) Integrated optics materials,(220.5450) Polishing

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