Wafer Level Fabrication of Evacuated Alkali Vapor Cells

Yang Li, Donggyu B. Sohn,Matthew Hummon,John Kitching

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We describe a wafer level fabrication process for evacuated Rb vapor cells. By etching channels on the wafer surface around the cell positions, we demonstrate wafers of cells with residual gas pressures below 5 mbar.

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