Hyperspectral Time-Domain Terahertz Nano Imaging
2018 IEEE Research and Applications of Photonics In Defense Conference (RAPID)(2018)
Abstract
We demonstrate hyperspectral imaging of the charge carrier profiles of doped precharacterized SRAM arrays in the THz frequency range 13 cm
-1
-60 cm
-1
using a s-SNOM. We are able to map free carrier concentration in range of 1016 cm
-3
-1020 cm
-3
with broadband THz source.
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Key words
hyperspectral time-domain terahertz nano,hyperspectral imaging,charge carrier profiles,doped precharacterized SRAM arrays,THz frequency range,map free carrier concentration
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