A Dual-Band Micromachined On-Wafer Probe with Integrated Diplexer for Ultra-Broadband Measurements to 220 GHz
2023 IEEE/MTT-S International Microwave Symposium - IMS 2023（2023）
Abstract
This work presents a micromachined dual-band probe for ultra-broadband single-sweep measurements to 220 GHz. The probe features both WR-5.1 waveguide and 1.0 mm coaxial inputs that are combined in an integrated passive diplexer. The probe shows a maximum loss in the crossover region of 6-7 dB and a minimum output return loss of 10 dB.
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Key words
on-wafer probes,on-wafer measurement,diplexer,broadband,rectangular waveguide,network analysis,calibration,millimeter-wave
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