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Design and Evaluation of a Miniaturized Non-Resonant Photoacoustic CO2 Gas Sensor with Integrated Electronics

Nan Zhang,Ananya Srivastava, Xiaolin Li, Yuanchun Li, Zhenyue Zhou,Achim Bittner,Xiaofeng Zhou,Alfons Dehe

2023 IEEE SENSORS(2023)

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摘要
This paper presents a miniaturized non-resonant photoacoustic CO 2 gas sensor with integrated electronics. The photoacoustic sensor (PAS) consists of a black body IR emitter, an appropriate optical filter, and a highly sensitive microphone, which converts the generated acoustic waves to electrical signals. The integrated electronics unit facilitates a standalone PAS sensor system, controls and powers the system components, and processes the electrical signals to provide a corresponding CO 2 gas concentration. The performance of the developed CO 2 PAS is evaluated and characterized. The measurements are done in the range of 0–9000 ppm. A sensitivity of 0.074 μV/ppm is achieved in the concentration range of 0–1537 ppm. For such a miniaturized non-resonant PAS sensor, the theoretical limit of detection (LOD) reaches 2.2 ppm for a sampling time of 330 seconds. Considering the cost, size, and performance, this sensor demonstrates the considerable potential for accurate and reliable indoor air quality monitoring.
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关键词
Photoacoustic,Gas sensor,Miniaturized PAS,CO2 concentration measurements
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