Study of the Properties of AlN PMUT used as a Wireless Power Receiver

This paper mainly designed an aluminum nitride based piezoelectric micro-machined ultrasonic transducer (AlN PMUT) as a wireless power receiver. AlN PMUT is a stacked layers structure of Si/SiO ₂ /Mo/AlN/Al about 4μm/1μm/0.1μm/2μm/1μm in thickness from bottom to up suspended by a cavity measuring in 0.496mm×0.506mm. Fabrication and characterization are conducted as a wireless power receiver. According to the wireless power transmission experiment, AlN PMUT can generate a peak voltage about 38.6mV when it receives an input sonic wave with a sound pressure of 2×10^4Pa.