High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps
IEEE ELECTRON DEVICE LETTERS（2023）
关键词
Force,Light emitting diodes,Photoconductivity,Optical sensors,Gallium nitride,Tactile sensors,Integrated optics,Microsensors,GaN,tactile sensor,optical sensor,integrated optical device
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