An effective temperature compensation algorithm for CMOS-MEMS thermal-piezoresistive oscillators with SUB PPM/°C thermal stability
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)(2017)
Abstract
A real-time temperature compensation method using resistance control with two-point calibration, implemented in a CMOS-MEMS thermal-piezoresistive oscillator (TPO), has been demonstrated in this work. To enhance the thermal stability of the CMOS-MEMS TPO for future mass/aerosol sensing applications, a novel algorithm is proposed to attain a temperature coefficient of frequency (TCF) of only -0.5 ppm/°C which is 66 times improvement over uncompensated case. The implemented TPO has no passive compensation as the structure is made of CMOS back end oxide and polysilicon to obtain a high quality factor (Q) of 2,000 in air. The heater resistance serves as ambient temperature sensor. As a result, the proposed method only requires measurement at two temperature points to modify the controlled resistance of the heater and is much more convenient than other low TCF methods utilizing look-up table (LUT) or polynomial equation fit.
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Key words
temperature compensation algorithm,CMOS-MEMS thermal-piezoresistive oscillators,thermal stability,resistance control,two-point calibration,mass/aerosol sensing applications,passive compensation,CMOS back end oxide,quality factor,heater resistance,ambient temperature sensor,look-up table,polynomial equation fit
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