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Progress in Process Development of La0.7Sr0.3MnO3 Thin Films for Uncooled THz Bolometers

T. Quinten,Y. Lechaux,V. Pierron,C. Gunther, L. Machin,J. -F. Lampin,M. Faucher,B. Walter,B. Guillet

International Conference on Infrared, Millimeter, and Terahertz Waves（2023）

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Key words
La0.7Sr0.3MnO3 thin films,SrTiO3,uncooled THz bolometers
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