Terahertz Near-Field Imaging for Buried Structures

Pingchuan Ma,Johanna Kolbel,Angela Pizzuto,Daniel M. Mittleman

2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)（2023）

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摘要

We demonstrate terahertz imaging of deeply buried structures using the s-SNOM technique. Our approach successfully visualizes buried metallic lines at unprecedented depths, approximately 10 times larger than the probe diameter, opening up new possibilities for advanced quality control of semiconductors.

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关键词

10 times larger,deeply buried structures,metallic lines,probe diameter,s-SNOM technique,terahertz imaging,terahertz near-field imaging,unprecedented depths

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