Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design
MICROMACHINES(2023)
Abstract
This article presents a study of the electrophysical properties of a piezoceramic material for use in adaptive optics. The key characteristics that may be important for the manufacturing of piezoelectric deformable mirrors are the following: piezoelectric constants (d31, d33, d15), capacitance, elastic compliance values s for different crystal directions, and the dielectric loss tangent (tg delta). Based on PZT ceramics, the PKP-12 material was developed with high values of the dielectric constant, piezoelectric modulus, and electromechanical coupling coefficients. The deformable mirror control elements are made from the resulting material-piezoceramic combs with five individual actuators in a row. In this case, the stroke of the actuator is in the range of 4.1-4.3 microns and the capacitance of the actuator is about 12 nF.
MoreTranslated text
Key words
adaptive optics,PZT materials,relaxor ferroelectrics,wavefront control,deformable mirrors,multilayer actuator
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined