Review of Anti-Vibration Technology in Phase-Shifting Interferometry

Phase-shifting interferometry is a noncontact optical measurement method with high sensitivity. This method is widely used in optical surface and deformation measurements. However, environmental vibrations can have a significant influence on the obtained measurement results, producing fringe jitter and interference pattern ambiguity. To address these issues and improve the stability of phase-shifting interferometry, the anti-vibration technique can be used. In this article, the anti-vibration technology is divided into active and passive categories. Active anti-vibration is used for vibration isolation, that is, weakening the intensity of the vibration signal transmitted to the interference system. Passive anti-vibration is used to eliminate the influence of vibration on interferometry. Several types of passive anti-vibration technologies have been developed so far. In this article, existing passive phase-shifting interference anti-vibration technologies are classified and compared with respect to the frame number and real-time performance. Furthermore, the development direction of phase-shifting interference measurement anti-vibration technology is discussed.