Electro-Acoustic Analogies Between Thermoelastic Photoacoustic Response and RC Filters
2023 IEEE 33rd International Conference on Microelectronics (MIEL)(2023)
摘要
In this paper, it will be shown how to establish an electro-acoustic analogy between the transfer functions of the passive RC low-pass filter and the thermoelastic component of the photoacoustic signal. Establishing the required analogy paves the way to better thermal characterization of semiconductors, which is very important for the correct functioning of many electronic components individually, or as part of micro- or nano-electromechanical structures. To confirm this analogy, the experimental results will be shown, which were performed on an aluminum sample.
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