0.75–1.1 THz Passive Terahertz Components Based on High-Precision Micromachining Technologies

Recent times have witnessed a rapid development of the terahertz (THz) techniques owing to the increasing requirement for high-date-rate communication and high-resolution imaging. As essential components in THz wireless systems, research on high-performance THz passive components has garnered considerable interest. When it comes to some extremely high THz regions, e.g., the WR-1.0 band (0.75–1.1 THz), geometrical precision and manufacturing tolerance pose great challenges during the production of THz components. This paper introduces some progress of THz components operating at the band of 0.75–1.1 THz based on high-precision micromachining technologies, including a 0.9-THz waveguide filter and a 1.0-THz transmit-array antenna.