LOW-TEMPERATURE CATALYZED GROWTH AND PLASMONIC PROPERTIES OF COLUMNAR Au-SiOx NANOCOMPOSITE THIN FILMS

The optical properties of noble metal nanoparticles (NPs) can be efficiently controlled by their incorporation into host matrix films. Here, we report on the fabrication of composite films of gold NPs in a silicon suboxide matrix by a novel approach using a combination of pulsed laser deposition for NP production and gas-jet, electron-beam plasma chemical vapor deposition for low-temperature (300°C) synthesis of a SiOx (x = 0.38-1.55) thin film as a matrix for the NPs. The produced nanocomposite exhibits unexpected plasmonic properties, non-monotonically dependent on the matrix thickness, due to a porous columnar matrix structure grown from the NPs with variable oxygen content along the columns. This implies that low-temperature, gold-catalyzed oxidation of silicon occurs during the structure growth. Calculations based on Mie theory show that the refractive index of the obtained SiOx matrix can be as low as 1.2 at certain film thicknesses. Mechanisms of the columnar structure formation at different deposition stages are discussed. The synthesis approach can be used for the fabrication of optical thin-film materials with controllable low refractive index.