Application of NiO deposited by atomic layer deposition for carbon nanotubes catalytic growth

Leonid Filatov, Pavel Vishniakov,Ilya Ezhov, Ivan Gorbov,Denis Nazarov,Denis Olkhovskii,Rajesh Kumar,Shengjie Peng,Gang He,Vladislav Chernyavsky,Marina Gushchina,Maxim Maximov

MATERIALS LETTERS（2023）

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摘要

•Ni catalyst was synthesized by heat treated NiO films by atomic layer deposition.•Intensive carbon nanotubes growth is observed in the 3.5–3.9 nm range of NiO film.•Carbon nanotubes are “multi-walled” and consist of 15 ± 5 graphene layers.•Density of carbon nanotubes is 7.5 ± 0.2 × 1010 cm−2.

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关键词

Atomic layer deposition,ALD,Carbon nanotubes,CNTs,Catalyst

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