Optical ridge waveguides in Nd3+-doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS(2024)
摘要
In this work, the ridge waveguide was formed by the femtosecond laser ablation with a central wavelength of 0.808 mu m and a speed of 50 mu m/s on the planar Nd3+-doped fluorophosphate glass waveguide that was fabricated by the C3+ ion implantation with an energy of 6.0 MeV and a fluence of 1.0x10(12) C(3+)s/mm(2). The mechanism of the ion-implanted waveguide was discussed by the Stopping and Range of Ions in Matter 2013. The cross-section morphology of the ridge waveguide was captured by an optical microscope. Its mode characteristics were analyzed by the end-face coupling method. The ridge Nd3+-doped fluorophosphate glass waveguides have potential as fundamental structures for many optoelectronic devices including waveguide amplifiers and lasers.
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关键词
femtosecond laser ablation,ion implantation,Nd3+-doped fluorophosphate glasses,optical waveguide
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