Optical ridge waveguides in Nd3+-doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Chun-Xiao Liu,Yan Lu, Xiu-Jun Sun, Hong-Yu Chen

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS(2024)

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摘要
In this work, the ridge waveguide was formed by the femtosecond laser ablation with a central wavelength of 0.808 mu m and a speed of 50 mu m/s on the planar Nd3+-doped fluorophosphate glass waveguide that was fabricated by the C3+ ion implantation with an energy of 6.0 MeV and a fluence of 1.0x10(12) C(3+)s/mm(2). The mechanism of the ion-implanted waveguide was discussed by the Stopping and Range of Ions in Matter 2013. The cross-section morphology of the ridge waveguide was captured by an optical microscope. Its mode characteristics were analyzed by the end-face coupling method. The ridge Nd3+-doped fluorophosphate glass waveguides have potential as fundamental structures for many optoelectronic devices including waveguide amplifiers and lasers.
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关键词
femtosecond laser ablation,ion implantation,Nd3+-doped fluorophosphate glasses,optical waveguide
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