Manipulation of Zincum Oxide Nanowires for Bionanosensors Design
2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)(2023)
摘要
The individual ZnO nanowires are recognized recently as promising highly sensitive media for the gas and bionanosensors in configuration of properly functionalized field-effect-transistor (NWFET). The aim of the present work is to create an experimental prototype of ZnO NWFET using mechanical bottom-up 3D nanomanipulation by shape memory nanotweezers thermally controlled in the vacuum chamber of SEM.The nanotweezers were used to create NWFETs as well as FIB-CVD. The ZnO nanowire width was from 15 to 300 nm. The length of ZnO nanowires was in the range of 1 to 50 μm.
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关键词
ZnO nanowires,bionanosensors. hydrothermal method,gas sensors,shape memory effect,nanomanipulation,FIB,CVD,nanotweezers
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