Advances on Percussion Drilling with Femtosecond Laser in GHz-burst Mode

Micromachining of various materials with femtosecond lasers operating in the GHz-burst regime has recently attracted great attention. In this contribution, we show our latest results on top-down percussion drilling in different dielectrics in this new operating regime. The dependence on the burst parameters such as burst repetition rate, number of pulses per burst, and burst energy are discussed. Moreover, we will focus on the influence of the burst shape on the drilling process. The quality of the drilled holes and their reachable dimensions are presented.