Tuning Microstructure and Properties of MoNbTaWZr High Entropy Alloy Films by Adjusting the Parameters in High Power Impulse Magnetron Sputtering
THIN SOLID FILMS（2023）
Key words
High entropy alloy,Refractory metal,MoNbTaW,Thin film,Amorphous film,High power impulse magnetron sputtering
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