Impact of total ionizing dose on the alpha-soft error rate in FDSOI 28 nm SRAMs

Microelectronics Reliability(2023)

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摘要
Synergy effect of total ionizing dose (TID) on alpha-soft error rate (α-SER) in FDSOI 28 nm SRAM has been experimentally characterized using a dedicated setup combining alpha-particle irradiation (241Am solid source) in vacuum chamber and 10 keV X-ray irradiation. Measurements have been performed on a 3 Mbit single-port SRAM cut powered at 1 V. Irradiations up to 125 krad(Si) have been achieved and their impact on the α-SER has been characterized from the cumulated number of bitflips as a function of the exposition time to the alpha-source. Modelling and simulation have been used to link transistor threshold voltage variations to SRAM cell stability in terms of static noise margin (SNM), critical charge (Qcrit) and finally estimated SER, in good agreement with experimental results.
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关键词
Total ionizing dose, X-ray irradiation, Soft error rate, Synergy effects, Alpha particle, Single-event upset, Fully-depleted silicon-on-insulator, SRAM memory, Static noise margin, Critical charge, Modelling, Numerical simulation
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