Interface Potential Estimation on VO2/Si Heterojunction by Terahertz Emission Spectroscopy with Temperature Variation

Dongxun Yang,Fumikazu Murakami,Shingo Genchi,Hidekazu Tanaka,Masayoshi Tonouchi

2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)（2023）

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摘要

Terahertz emission spectroscopy has shown a lot of advantages in estimating the electric properties of semiconductor devices. In this research, we aim to observe the dynamic interface potential variation from VO 2 /Si heterojunction across the phase transition temperature by terahertz emission spectroscopy and attempt to evaluate the work function of VO 2 film in different phase conditions.

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