Microchannels Formed Using Metal Microdroplets

Micromachines(2023)

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摘要
The metal microdroplet deposition manufacturing technique has gained extensive attention due to its potential applications in microstructure fabrication. In order to fabricate components such as microchannel heat sinks and microchannel reactors, this paper investigates the interactions and influences between microdroplets and substrates, as well as between microdroplets themselves. The transient phenomena during the fusion of metal microdroplets in contact with the substrate and the formation of inclined columns, as well as the solid-liquid coupling and morphology formation processes during the collision between microdroplets, are analyzed. The influence of microdroplet spacing on the morphology of microchannels during their formation is specifically studied. A three-dimensional finite element numerical model for the deposition of metal microdroplets forming inclined pillars is established based on the volume of fluid (VOF) method. The model treats the protective gas around the microdroplet as an empty zone and the microdroplet as a single-phase fluid. Simulation analysis is conducted to investigate the forming patterns of unsupported microdroplets at different spacing and their impact on the fusion morphology of microchannel components. Building upon this, a series of validation experiments are conducted using a piezoelectric microdroplet generator to produce uniform aluminum alloy microdroplets with a diameter of approximately 600 mu m. A method for fabricating metal microchannel structures is obtained, which is expected to be applied in fields such as scattering structures for high-power electronic devices and microreactors in microchemical fields.
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