Exploring Volatile Precursors: Synthesis, Characterization and Thermal Properties of Thulium Fluoroacetylacetonate Complexes

Daniel Fuhrmann, Kristin Kaden, Marika Kandler,Maik Icker,Harald Krautscheid

Crystals（2023）

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摘要

Five trifluoroacetylacetonate (tfaa(-)) complexes [Tm(tfaa)(3)(H2O)](2), [Tm(tfaa)(3)(H2O)(2)], [Tm(tfaa)(3)(H2O)(2)] diglyme, [Tm(tfaa)(3)(DME)] (DME = 1,2-dimethoxyethane) and [TmCl2(tfaa)(diglyme)] (diglyme = bis(2-methoxyethyl) ether) of thulium have been synthesized and characterized by X-ray single-crystal structure analysis and spectroscopic techniques. Thermoanalytical studies at elevated temperatures provide information about their volatility. The results are compared with the hexafluoroacetylacetonate (hfaa(-)) complexes of thulium known in the literature, which were reported as volatile precursors for CVD application. The reported high volatility of [Tm(hfaa)(3)(DME)] was confirmed and compared with those of the aqueous complexes which show a lower transport rate. In addition, the new crystal structures of the hexafluoroacetylacetonate complexes [Tm(hfaa)(3)(H2O)(2)], [Tm(hfaa)(2)(tfa)(H2O)(2)](2) (tfa(-) = trifluoroacetate), [Tm(hfaa)(3)(DME)NaCl](2) and Na[Tm(hfaa)(4)] are presented.

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关键词

thulium, beta-diketonates, CVD precursor, crystal structures, thermal behavior

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