Effect of temperature on the growth of two-dimensional MoS2 on low-cost soda-lime glass
CURRENT APPLIED PHYSICS(2024)
Abstract
In recent years, the growth of high-quality MoS2 on low-cost glass substrates has attracted extensive attention due to its advantages in terms of low cost, rapid growth rate, and excellent repeatability. In this study, we systematically investigated the effect of temperature on the CVD growth of high-quality MoS2 on low-cost glass substrates. Our experimental results show that increasing the growth temperature from 900 degrees C to 1050 degrees C in the region far from the molybdenum source results in high-quality large-domain MoS2 growth, with the domain size of triangular MoS2 increasing from 109 mu m to 1.27 mm. Furthermore, in the region close to the molybdenum source, we obtained high-quality bilayer MoS2 films with a continuous region larger than 19 mm x 8 mm by increasing the growth temperature from 900 degrees C to 1050 degrees C. These results are significant for the cost-effective and high-quality synthesis of MoS2 and its potential industrial applications.
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Key words
Molybdenum disulfide,BilayerMoS2,Glass,Chemical vapor deposition,Temperature
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