Effect of Copper Content on the Microstructure, Morphology, and Optical Properties of ZrSiN Coatings Deposited Using Pulsed-Direct Current Reactive Magnetron Sputtering
THIN SOLID FILMS（2023）
关键词
Zirconium silicon nitride,Copper,Composite,Sputtering,Nanocomposites,Microstructure
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