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Implementation and Displacement Self-Sensing of a 4-DOF Piezoelectric Micromanipulator

Li Yu,Yu-Guo Cui,Yi-Ling Yang, Zhi-Wen Xiong,Jian-Qiang Ma,Guo-Ping Li,Jun-Qiang Lou

Precision Engineering（2024）

Cited 0|Views26
Key words
Piezoelectric micromanipulator,4-DOF,Output displacement,Self-sensing,Clamping operation
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