Recent progress on laser interferometry based on vortex beams: Status, challenges, and perspectives

OPTICS AND LASERS IN ENGINEERING(2024)

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摘要
Laser interferometry is favored for its non-contact, high-resolution, and dynamic range capabilities. Vortex beams can enhance accuracy and robustness with their degrees of freedom and spiral phase information without the need for excessive modifications to the interferometric optical path. Consequently, laser interferometry based on vortex beams (LIVB) has become one of the most effective optimization strategies. This paper reviews its research status, including measurement principles, methods, and signal processing techniques for linear displacement, rotation, and surface parameters. Furthermore, the review presents a comparative analysis of several representative measurement systems. Finally, it provides prospects for the development of LIVB, highlighting its high accuracy and robustness, as well as the trend of integrating multiple technologies.
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关键词
Precision manufacturing/metrology,Laser interferometry,Vortex beams,Spiral phase
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