Over 500% Frequency Tuning Range in Nanoelectromechanical Resonators Based on Ultrasoft Two-Dimensional Semiconductor BiOI

SummaryNanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials can have motional parts that are atomically thin, and thus can be more sensitive to external tension compared with MEMS resonators based on bulk crystals in terms of frequency tuning by gate. In this work, by using ultrasoft 2D semiconductor bismuth oxyiodide (BiOI), we demonstrate gate tuning of the resonance frequency exceeding 500% in NEMS resonators, the highest value reported to date. Our results can enable ultra-tunable NEMS resonators that can function over a very broad bandwidth.