Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array

With the in-depth development and continuous innovation of micro and nano manufacturing technology, flexible strain sensors are more and more widely used in various fields, including soft robots, smart clothing and so on, and high-performance sensors are more in demand. An efficient tactic for enhancing the performance of flexible strain sensors is to design and create hierarchical structures, and its efficient and controllable manufacturing is a key problem. The controllable manufacturing of V-groove/wrinkles hierarchical structure is realized by nano-imprint and prestretch-release process, which provides an effective method for large-area controllable preparation of hierarchical structure, and provides a foundation for the construction of high-performance flexible strain sensor. Single-factor experiments were carried out on the slope of the primary structure, pre-strain and substrate thickness, and response surface analysis was carried out by Box-Behnken experiments. The results of the structure's formation are significantly influenced by the slope and substrate thickness, and the optimal process parameters are obtained by response surface analysis. Then the impact of each process parameter was investigated using a process simulation model. Finally, the forming conditions of hierarchical structure are analyzed. This study can provide guidance for the efficient and controllable manufacturing of micro/nano hierarchical structures.