Structure and Properties of Cermet Coatings Produced by Vacuum-Arc Evaporation of a High-Entropy Alloy

Multilayer cermet coatings based on a TiNbZrTaHf high-entropy alloy were produced on solid substrates by plasma-assisted vacuum-arc deposition. The assisting multicomponent metal-gas plasma was generated by evaporating TiNbZrTaHf cathodes in a gas mixture of nitrogen and argon. It was found that the coatings were nanocrystalline in structure (with nanocrystal sizes ranging from 2.5 to 4 nm). The metallic layer had a body-centered cubic lattice (a = 0.33396 nm), and the ceramic layer had a face-centered cubic lattice (a = 0.44465 nm). Transition layers formed between the substrate and the metallic layer and between the metallic and the ceramic layers were revealed. The hardness of the coatings was 36.7 GPa and their Young's modulus was 323 GPa.