Real-Time Quantitative Electromechanical Characterization of Nanomaterials Based on Integrated MEMS Device

Electromechanical characterization has a guiding significance for predicting the service behavior of nanomaterials. Herein, we design a thermal driving-based MEMS device using the MEMS process that integrates mechanical test components, electrical test components, and isolation components to avoid interference between the mechanical and electrical components. Based on the MEMS device, we developed an in situ real-time quantitative dynamic testing technique and performed on individual TiO2 nanowire. The results show that the TiO2 nanowire has excellent stability under static stretching-recovering and 500 dynamic stretching cycles with a frequency of 1 Hz. Meanwhile, the effects of ion beam irradiation on the microstructure and intrinsic properties of TiO2 nanowires were also analyzed. Quantitative tests revealed a 79.05% and 86.82% decrease in the Young modulus and resistance of the nanowires after irradiation, respectively. The proposed technique opens up the possibility of real-time dynamic cyclic testing for nanoscale strain engineering and provides a direct relationship between the measured parameters and the microstructure.