Dielectric Function of VO2 determined by Spectroscopic Ellipsometry

Dustin Louisos,Micheal McLamb,James Ginn,Andrew P. Warren,Glenn D. Boreman,Mario Junior Mencagli,Andrew Willis,Tino Hofmann,Jimmy E. Touma

2023 IEEE Research and Applications of Photonics in Defense Conference (RAPID)（2023）

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摘要

The transition metal oxide VO 2 exhibits a metal-insulator transition and is of interest for dynamic metamaterial applications. Here the complex dielectric function of VO 2 , de-posited via magnetron sputtering, is determined below and above the metal-insulator transition temperature using spectroscopic ellipsometry over a wide soectral range.

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关键词

Vanadium dioxide,Spectroscopic ellipsomecry,Phase-change material

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